Optical method for simultaneous thickness measurements of two layers with a significant thickness difference
Jaeseok Bae; Jungjae Park; Heulbi Ahn; Jonghan Jin · 2021 · Optics Express
WASTE classifies this as Negative / Null Result Report · AI classification, approximate
The study found no significant effect — useful as a negative control or null benchmark for your own design.
Abstract (excerpt)
In this study, an optical method that allows simultaneous thickness measurements of two different layers distributed over a broad thickness range from several tens of nanometers to a few millimeters based on the integration of a…
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Metadata source: Crossref · DOI 10.1364/oe.440507